Si: B, P, Sb Diffusion
a.47
a.47
Si: B Diffusion, Ion Implantation, Dislocations, and Point Defects
a.48
a.48
Si: B Diffusion, Dislocations, Point Defects, and Defect Annealing
a.49
a.49
Si: B Diffusion and Point Defects
a.50
a.50
Si: H Diffusion
a.51
a.51
Si, SiO2: H Diffusion and Ion Implantation
a.52
a.52
Si: H Diffusion and Point Defects
a.53
a.53
Si: O Diffusion
a.54
a.54
Si: Si Diffusion
a.55
a.55
Si: H Diffusion
Page: A51