Si, SiO2: H Diffusion and Ion Implantation
a.52
a.52
Si: H Diffusion and Point Defects
a.53
a.53
Si: O Diffusion
a.54
a.54
Si: Si Diffusion
a.55
a.55
Si: Si Surface Diffusion and Electromigration
a.56
a.56
Si, SiGe: Ion Bombardment, Point Defects, and Defect Annealing
a.57
a.57
Si: Ion Bombardment and Surface Reconstruction
a.58
a.58
Si: Ion Implantation and Point Defects
a.59
a.59
Si: Ion Implantation and Point Defects
a.60
a.60
Si: Si Surface Diffusion and Electromigration
Page: A56