Si: Surface Defects
a.86
a.86
Si/Ge: Interdiffusion
a.87
a.87
Si/Ge: Interdiffusion
a.88
a.88
Si/SiO2/Si: O Diffusion and Point Defects
a.89
a.89
Si/SiO2: Interface Defects
a.90
a.90
Si-C/Si: Dislocations, Stacking Faults, and Twins
a.91
a.91
SiGe: B Diffusion
a.92
a.92
SiGe: Ion Implantation, Dislocations, and Defect Annealing
a.93
a.93
SiGe: Ion Implantation, Point Defects, and Defect Annealing
a.94
a.94
Si/SiO2: Interface Defects
Page: A90