Si/SiO2: Ion Implantation and Point Defects
a.280
a.280
Si/SiO2: Dislocations, Point Defects, and Stacking Faults
a.281
a.281
Si/SiO2: Interface Defects
a.282
a.282
Si/SiO2: Interface Defects
a.283
a.283
Si/SiO2: Point Defects
a.284
a.284
SiGe: Diffusion
a.285
a.285
SiGe: Sb Diffusion
a.286
a.286
SiGe: Dislocations
a.287
a.287
SiGe/Ge, SiGe/Si: Dislocations
a.288
a.288
Si/SiO2: Point Defects
Page: A284