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Vols. 134-135

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HomeDefect and Diffusion ForumDefect and Diffusion Forum Vols. 134-135

Defect and Diffusion Forum Vols. 134-135

DOI:

https://doi.org/10.4028/www.scientific.net/DDF.134-135

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Table of Contents

Abstract Title Page

Si/SiGe: Dislocations

279

Si/SiO₂: Ion Implantation and Point Defects

280

Si/SiO₂: Dislocations, Point Defects, and Stacking Faults

281

Si/SiO₂: Interface Defects

282

Si/SiO₂: Interface Defects

283

Si/SiO₂: Point Defects

284

SiGe: Diffusion

285

SiGe: Sb Diffusion

286

SiGe: Dislocations

287

SiGe/Ge, SiGe/Si: Dislocations

288