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HomeDefect and Diffusion ForumDefect and Diffusion Forum Vols. 138-139Analysis of Minute StrainFields around...

Analysis of Minute StrainFields around Microdefects in Silicion Crystals by Plane-Wave X-Ray Topography

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Defect and Diffusion Forum Vols. 138-139

Info:

Periodical:

Defect and Diffusion Forum (Volumes 138-139)

Pages:

49-62

DOI:

https://doi.org/10.4028/www.scientific.net/DDF.138-139.49

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Online since:

March 1996

Authors:

Shigeru Kimura, Takashi Ishikawa, J. Matsui

Keywords:

Fourier Transform Infrared Spectroscopy (FTIR), Lattice Strains, Microdefects, Oxygen Precipitation, Plane-Wave X-Ray Topography, Silicon, Synchroton Radiation

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© 1996 Trans Tech Publications Ltd. All Rights Reserved

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