Si/SiO2: Dislocations
a.172
a.172
Si/SiO2: Dislocations
a.173
a.173
Si/SiO2: Point Defects
a.174
a.174
Si/SiO2: Point Defects
a.175
a.175
Si/SiO2: Point Defects
a.176
a.176
Si/SiO2: Stacking Faults
a.177
a.177
SiGe: Ion Implantation and Point Defects
a.178
a.178
SiGe: Dislocations and Surface Defects
a.179
a.179
SiGe/Si: Interdiffusion and Point Defects
a.180
a.180
Si/SiO2: Point Defects
Page: A176