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HomeDefect and Diffusion ForumDefect and Diffusion Forum Vols. 160-161On the Incorporation of Carbon In SiO2 Layers

On the Incorporation of Carbon In SiO₂ Layers

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Surface Diffusion and Surface Structure

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Periodical:

Defect and Diffusion Forum (Volumes 160-161)

Pages:

1-24

DOI:

https://doi.org/10.4028/www.scientific.net/DDF.160-161.1

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Online since:

May 1998

Authors:

B. Garrido, C. Bonafos, M. López, A. Cuadras, A. Pérez-Rodríguez, Klaus Pressel, J.R. Morante

Keywords:

Carbon Diffusion, Ion Implantation, Luminescence, Oxidation, Si_1-yC_y

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© 1998 Trans Tech Publications Ltd. All Rights Reserved

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