Internal Friction of Copper Thin Layers on Silicon Substrates

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Periodical:

Defect and Diffusion Forum (Volumes 203-205)

Edited by:

D.J. Fisher

Pages:

285-288

DOI:

10.4028/www.scientific.net/DDF.203-205.285

Citation:

J. von der Hagen et al., "Internal Friction of Copper Thin Layers on Silicon Substrates", Defect and Diffusion Forum, Vols. 203-205, pp. 285-288, 2002

Online since:

February 2002

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