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HomeDefect and Diffusion ForumDefect and Diffusion Forum Vols. 203-205Internal Friction of Copper Thin Layers on Silicon...

Internal Friction of Copper Thin Layers on Silicon Substrates

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Defects and Diffusion in Metals IV

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Periodical:

Defect and Diffusion Forum (Volumes 203-205)

Pages:

285-288

DOI:

https://doi.org/10.4028/www.scientific.net/DDF.203-205.285

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Online since:

February 2002

Authors:

J. von der Hagen, M. Weller, E. Arzt

Keywords:

Copper Films, Core Diffusion, Dislocation Relaxation, Internal Friction

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© 2002 Trans Tech Publications Ltd. All Rights Reserved

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