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Abstracts
Si3N4: H Diffusion
a.682
Si3N4: N Diffusion
a.683
Si3N4: N Diffusion
a.684
Si3N4: N, Si Diffusion
a.685
SiON: B Diffusion
a.686
TaN: Cu Diffusion
a.687
TaN: Cu Diffusion
a.688
TaN: Cu Grain Boundary Diffusion
a.689
TiN: Cu Diffusion
a.690

SiON: B Diffusion

Page: A686

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