The Role of Vacancies and Self-Interstitials in Impurity Diffusion in Silicon

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Edited by:

Fred H. Wohlbier and Prof. David J. Fisher

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1-0

Citation:

R.B. Fair, "The Role of Vacancies and Self-Interstitials in Impurity Diffusion in Silicon", Defect and Diffusion Forum, Vol. 37, pp. 1-0, 1984

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January 1991

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