Defect Related to Nitrogen Implantation in Silicon Single Crystals

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Periodical:

Edited by:

F.H. Wohlbier

Pages:

21-28

DOI:

10.4028/www.scientific.net/DDF.48.21

Citation:

M. Bode et al., "Defect Related to Nitrogen Implantation in Silicon Single Crystals", Defect and Diffusion Forum, Vol. 48, pp. 21-28, 1987

Online since:

January 1987

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$35.00

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