Ion Implantation in Semiconductors: Role of Diffusion

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Periodical:

Defect and Diffusion Forum (Volumes 51-52)

Edited by:

F.H. Wohlbier

Pages:

1-108

DOI:

10.4028/www.scientific.net/DDF.51-52.1

Citation:

B. Sharma "Ion Implantation in Semiconductors: Role of Diffusion", Defect and Diffusion Forum, Vols. 51-52, pp. 1-108, 1987

Online since:

January 1987

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$35.00

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