Thermal Spike Regime during Ion Implantation: New Aspects

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Periodical:

Defect and Diffusion Forum (Volumes 57-58)

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Edited by:

F. H. Wöhlbier

Pages:

221-227

DOI:

10.4028/www.scientific.net/DDF.57-58.221

Citation:

L.M. Gratton et al., "Thermal Spike Regime during Ion Implantation: New Aspects", Defect and Diffusion Forum, Vols. 57-58, pp. 221-227, 1988

Online since:

January 1988

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$35.00

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