The Production of Periodic Surface Features by Sputtering and Related Processes

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Periodical:

Defect and Diffusion Forum (Volumes 57-58)

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Edited by:

Fred H. Wohlbier

Pages:

49-60

Citation:

G. Carter et al., "The Production of Periodic Surface Features by Sputtering and Related Processes", Defect and Diffusion Forum, Vols. 57-58, pp. 49-60, 1988

Online since:

January 1988

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Price:

$38.00

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