Preparation of a Thin Film of Al / Al2O3 Using a Single Source Precursor

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Edited by:

Jung-Ho Ahn and Yoo-Dong Hahn

Pages:

279-282

Citation:

M. Veith and K. Andres, "Preparation of a Thin Film of Al / Al2O3 Using a Single Source Precursor", Journal of Metastable and Nanocrystalline Materials, Vols. 15-16, pp. 279-282, 2003

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April 2003

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