Microstructure and Interface Analyses of TiN Thin Films Deposited on M2 Speed Steel Substrate by Cathodic Arc Technique

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C.S. Kiminami, C. Bolfarini and W.J. Botta F.

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654-658

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R.A. Vieira and M. do C. de A. Nono, "Microstructure and Interface Analyses of TiN Thin Films Deposited on M2 Speed Steel Substrate by Cathodic Arc Technique", Journal of Metastable and Nanocrystalline Materials, Vols. 20-21, pp. 654-658, 2004

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July 2004

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