Roles of Internal Stress and Morphology on Adhesion and Cohesion of Ion-Plated Nitride Films

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Periodical:

Key Engineering Materials (Volumes 111-112)

Edited by:

K. Uematsu, Y. Moriyoshi, Y. Saito and J. Nowotny

Pages:

225-252

DOI:

10.4028/www.scientific.net/KEM.111-112.225

Citation:

H. Ichimura "Roles of Internal Stress and Morphology on Adhesion and Cohesion of Ion-Plated Nitride Films", Key Engineering Materials, Vols. 111-112, pp. 225-252, 1995

Online since:

September 1995

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$35.00

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