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HomeKey Engineering MaterialsKey Engineering Materials Vols. 111-112Roles of Internal Stress and Morphology on...

Roles of Internal Stress and Morphology on Adhesion and Cohesion of Ion-Plated Nitride Films

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Interfaces of Ceramic Materials

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Periodical:

Key Engineering Materials (Volumes 111-112)

Pages:

225-252

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.111-112.225

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Online since:

September 1995

Authors:

H. Ichimura

Keywords:

Acoustic Emission (AE), Adhesion, Cohesion, Internal Stress, Ion Plating, Morpholoy, Substrate Bias, Titanium Nitride TiN, Wear Resistance

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© 1995 Trans Tech Publications Ltd. All Rights Reserved

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