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HomeKey Engineering MaterialsKey Engineering Materials Vols. 118-119Magnetic Field in a Commercial Sputter Magnetron

Magnetic Field in a Commercial Sputter Magnetron

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Frontiers for Engineering Materials

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Periodical:

Key Engineering Materials (Volumes 118-119)

Pages:

287-294

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.118-119.287

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Online since:

March 1996

Authors:

John Monaghan, D.C. Cameron, M.S.J. Hashmi

Keywords:

Conformal Mapping, Magnetic Field, Magnetron Sputtering, Sputter Magnetron

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© 1996 Trans Tech Publications Ltd. All Rights Reserved

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