Reactions between SiCl4 and NH3 Leading to the Formation of Silicon Nitride Powders

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Periodical:

Key Engineering Materials (Volumes 132-136)

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Edited by:

P. Abelard, J. Baxter, D. Bortzmeyer et al.

Pages:

149-152

DOI:

10.4028/www.scientific.net/KEM.132-136.149

Citation:

G. Ziegenbalg et al., "Reactions between SiCl4 and NH3 Leading to the Formation of Silicon Nitride Powders", Key Engineering Materials, Vols. 132-136, pp. 149-152, 1997

Online since:

April 1997

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$35.00

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