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HomeKey Engineering MaterialsKey Engineering Materials Vols. 138-140CVD Reactors for Coating TiN Thin Films onto a...

CVD Reactors for Coating TiN Thin Films onto a Tungsten Carbide Surface

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Advanced Ceramic Tools for Machining Application - III

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Periodical:

Key Engineering Materials (Volumes 138-140)

Pages:

449-478

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.138-140.449

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Online since:

September 1997

Authors:

Ping Ding, Wei-Kang Yuan

Keywords:

Cutting Tool, CVD Reactor, Kinetic, Mathematical Modeling, Thermodynamic, TiN Coating, Transport Phenomena

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© 1998 Trans Tech Publications Ltd. All Rights Reserved

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