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Crystal Structure and Electrical Properties of (Pb,Ca)TiO3 Thin Films by Multiple-Cathode Sputtering

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Periodical:

Key Engineering Materials (Volumes 157-158)

Pages:

159-166

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.157-158.159

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Online since:

May 1998

Authors:

Hiroshi Maiwa, Noboru Ichinose

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© 1999 Trans Tech Publications Ltd. All Rights Reserved

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