Research on CMP Process Parameters Effect on Slurry Transport

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Periodical:

Key Engineering Materials (Volumes 202-203)

Edited by:

Xipeng Xu, Jianyun Shen and Yuan Li

Pages:

281-284

Citation:

Z.W. Shen et al., "Research on CMP Process Parameters Effect on Slurry Transport", Key Engineering Materials, Vols. 202-203, pp. 281-284, 2001

Online since:

June 2001

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Price:

$38.00

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