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HomeKey Engineering MaterialsKey Engineering Materials Vols. 206-213Orientation Control of KNbO3 Thin Film on Silicon...

Orientation Control of KNbO₃ Thin Film on Silicon Wafer with Chemical Solution Deposition

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Euro Ceramics VII

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Periodical:

Key Engineering Materials (Volumes 206-213)

Pages:

1493-1496

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.206-213.1493

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Online since:

December 2001

Authors:

Hisao Suzuki, Tomoya Ohno, Hidetoshi Miyazaki, De Sheng Fu, Kenji Ishikawa, Kohei Kodaira

Keywords:

Chemical Solution Deposition CSD, Orientation Control, Potassium Niobate, Thin Film

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© 2002 Trans Tech Publications Ltd. All Rights Reserved

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