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HomeKey Engineering MaterialsKey Engineering Materials Vols. 206-213Microstructure Control of Silica Thin Film by Spin...

Microstructure Control of Silica Thin Film by Spin Coating Method

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Euro Ceramics VII

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Periodical:

Key Engineering Materials (Volumes 206-213)

Pages:

2185-2188

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.206-213.2185

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Online since:

December 2001

Authors:

Tomoya Ohno, Hisao Suzuki, Junichi Takahashi, Shirou Shimada, Toshitaka Ota, Minoru Takahashi, Yasuo Hikichi

Keywords:

Deposition Mechanism, Microstructure Control, Silica Monodisperse Particles, Thin Film

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© 2002 Trans Tech Publications Ltd. All Rights Reserved

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