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HomeKey Engineering MaterialsKey Engineering Materials Vols. 206-213Mechanical and Optical Properties of c-BN Films...

Mechanical and Optical Properties of c-BN Films Deposited by ECR-Microwave PECVD

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Euro Ceramics VII

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Periodical:

Key Engineering Materials (Volumes 206-213)

Pages:

471-474

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.206-213.471

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Online since:

December 2001

Authors:

Marie-Paule Delplancke-Ogletree, M. Ye

Keywords:

Cubic Boron Nitride (CBN), Superhard Material, Thin Film, VHF PECVD

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© 2002 Trans Tech Publications Ltd. All Rights Reserved

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