Sol-Gel Processing of Oxide Gate Insulator from Trifluoroacetate Precursors

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Periodical:

Key Engineering Materials (Volumes 228-229)

Edited by:

T. Kimura, K. Koumoto, T. Takenaka, S. Fujitsu, K. Shinozaki

Pages:

259-262

Citation:

K. Yamamoto et al., "Sol-Gel Processing of Oxide Gate Insulator from Trifluoroacetate Precursors", Key Engineering Materials, Vols. 228-229, pp. 259-262, 2002

Online since:

September 2002

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