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HomeKey Engineering MaterialsKey Engineering Materials Vol. 247Effect of Texture and Structure of Carbon Sources...

Effect of Texture and Structure of Carbon Sources on Synthesis of β-SiC Thin Film

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Advanced Ceramics and Composites

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Periodical:

Key Engineering Materials (Volume 247)

Pages:

141-144

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.247.141

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Online since:

August 2003

Authors:

Yasuo Uchiyama, Naoki Urase, Takehiro Higuchi, Hideaki Sano

Keywords:

Carbon Source, Gaseous Silicon Monoxide, Structure, Texture, Thin Film, β-Silicon Carbide

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© 2003 Trans Tech Publications Ltd. All Rights Reserved

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