XPS Study of N-doped TiOx Thin Films Prepared By DC Reactive Magnetron Sputtering

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Lianmeng Zhang, Jingkun Guo and Wei-Hsing Tuan

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457-462

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Q.N. Zhao et al., "XPS Study of N-doped TiOx Thin Films Prepared By DC Reactive Magnetron Sputtering", Key Engineering Materials, Vol. 249, pp. 457-462, 2003

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September 2003

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