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HomeKey Engineering MaterialsKey Engineering Materials Vol. 249XPS Study of N-doped TiOx Thin Films Prepared By...

XPS Study of N-doped TiO_x Thin Films Prepared By DC Reactive Magnetron Sputtering

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Composite Materials III

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Periodical:

Key Engineering Materials (Volume 249)

Pages:

457-462

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.249.457

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Online since:

September 2003

Authors:

Q.N. Zhao, C.L. Li, X. He, X.J. Zhao

Keywords:

D.C. Reactive Sputtering, Hydroxyl Groups, N-doped TiO₂Films , X-Ray Photoelectron Spectroscopy (XPS)

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© 2003 Trans Tech Publications Ltd. All Rights Reserved

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