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HomeKey Engineering MaterialsKey Engineering Materials Vols. 264-268Preparation of TiN-Based Nitride Composite Films...

Preparation of TiN-Based Nitride Composite Films from Alkoxide Solution by Liquid Injection Thermal Plasma CVD Method

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Euro Ceramics VIII

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Periodical:

Key Engineering Materials (Volumes 264-268)

Pages:

49-52

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.264-268.49

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Online since:

May 2004

Authors:

Shiro Shimada, K. Tsukurimichi, Yusuke Takada, J. Tsujino

Keywords:

Alkoxide Solution, Chemical Vapor Deposition (CVD), Composite Film, Liquid Injection, Nitride, Plasma, Titanium Nitride TiN

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© 2004 Trans Tech Publications Ltd. All Rights Reserved

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