Preparation of TiN-Based Nitride Composite Films from Alkoxide Solution by Liquid Injection Thermal Plasma CVD Method

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Periodical:

Key Engineering Materials (Volumes 264-268)

Main Theme:

Edited by:

Hasan Mandal and Lütfi Öveçoglu

Pages:

49-52

DOI:

10.4028/www.scientific.net/KEM.264-268.49

Citation:

S. Shimada et al., "Preparation of TiN-Based Nitride Composite Films from Alkoxide Solution by Liquid Injection Thermal Plasma CVD Method ", Key Engineering Materials, Vols. 264-268, pp. 49-52, 2004

Online since:

May 2004

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$35.00

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