Machinability Evaluation of Si3N4-hBN Composites for Micro Pattern Making Processes

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Key Engineering Materials (Volumes 264-268)

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Edited by:

Hasan Mandal and Lütfi Öveçoglu

Pages:

869-872

Citation:

M. W. Cho et al., "Machinability Evaluation of Si3N4-hBN Composites for Micro Pattern Making Processes", Key Engineering Materials, Vols. 264-268, pp. 869-872, 2004

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May 2004

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[1] R.F. Krause, Jr.: J. Am. Ceram. Soc., Vol. 71 (1988), p.338.

[2] E.H. Lutz and M.V. Swain: J. Am. Ceram. Soc., Vol. 75 (1992), p.67.

[3] S.W. Na and J. Lee: J. Kor. Ceram. Soc., Vol. 37 (2000), p.368.

[4] D. Solignac, A. Sayah, S. Constantin, R. Freitag, M.A.M. Gijs: Sensor and Actuators A 3003 (2001), p.1.

[5] H. Wensink, U.W. Berenshot, H.V. Janseu, M.C. Elwenspoek: Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS) (2000), p.769.

[6] G. Zhang, Y. Cao and L. Qi: Transactions of NAMRI/SME, Vol. XXVII (1999), p.159.