Non-Destructive Characteristics Evaluation for Low Vacuum Dry Pumps in the Semi-Conductor Manufacturing Process Line

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Periodical:

Key Engineering Materials (Volumes 270-273)

Edited by:

Seung-Seok Lee, Dong-Jin Yoon, Joon-Hyun Lee and Sekyung Lee

Pages:

2345-2350

Citation:

J. Y. Lim et al., "Non-Destructive Characteristics Evaluation for Low Vacuum Dry Pumps in the Semi-Conductor Manufacturing Process Line ", Key Engineering Materials, Vols. 270-273, pp. 2345-2350, 2004

Online since:

August 2004

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$38.00

[1] A.P. Troup and N.T.M. Dennis, Six years of dry pumping: A review of experience and issues, J. Vac. Sci. Technol. A, Vol. 9, No. 3, May/Jun (1991).

[2] ISO/CD 1607, Positive displacement vacuum pumps-measurement of performance characteristics.

[3] ISO/CD 5607, Vacuum technology - vacuum pumps - roots blowers acceptance specifications.

[4] PNEUROP 6602, Vacuum pumps; acceptance specifications.

[5] ISO 10816-1: 1995, Mechanical vibration - evaluation of machine vibration by measurements on rotating parts - Part 1: General guidelines.

DOI: https://doi.org/10.3403/00737904u

[6] W.S. Cheung, J.Y. Lim, K.H. Chung, Experimental study on noise characteristics of dry pumps, Internoise 2002 International Congress and Exposition on Noise Control Engineering, Dearbon, MI, USA, August 21-22, (2002).

[7] ISO 3744: 1994, Determination of sound power levels of noise sources - Engineering method in an essentially free field over a reflecting plane.

DOI: https://doi.org/10.3403/00684183u

[8] J. Y. Lim, Wansup Cheung, et al., Mass flow and dry pumping characteristics for low vacuum generation and control on BIEN technology, " International Women, s Conference on BIEN- Technology, PaiChai University, Daejeon, Korea, November 13-15, (2003).

[9] R. Bahnen and M. Kuhn, Increased reliability of dry pumps due to process related adaptation and prefailure warning, Vacuum, volume 44, 709-712, (1993).

DOI: https://doi.org/10.1016/0042-207x(93)90130-3

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