Non-Destructive Characteristics Evaluation for Low Vacuum Dry Pumps in the Semi-Conductor Manufacturing Process Line

Abstract:

Article Preview

Info:

Periodical:

Key Engineering Materials (Volumes 270-273)

Edited by:

Seung-Seok Lee, Dong-Jin Yoon, Joon-Hyun Lee and Sekyung Lee

Pages:

2345-2350

DOI:

10.4028/www.scientific.net/KEM.270-273.2345

Citation:

J. Y. Lim et al., "Non-Destructive Characteristics Evaluation for Low Vacuum Dry Pumps in the Semi-Conductor Manufacturing Process Line ", Key Engineering Materials, Vols. 270-273, pp. 2345-2350, 2004

Online since:

August 2004

Export:

Price:

$35.00

In order to see related information, you need to Login.

In order to see related information, you need to Login.