Measurement of Continuous Micro-Tensile Strain Using Micro-ESPI Technique

Yong Hak Huh; Dong Iel Kim; Chang Doo Kee

doi:10.4028/www.scientific.net/KEM.297-300.53

Paper Titles

Fatigue Life Evaluation for a Reaping Knife of Combine
p.28

Image Processing Techniques Applied to Automatic Measurement of the Fatigue-Crack
p.34

Analytical Study on Biaxial Strength of Structural Ceramics under Tension-Compression Condition
p.40

Development of Corroded Gas Pipeline Assessment Program Based on Limit Load Solution
p.47

Measurement of Continuous Micro-Tensile Strain Using Micro-ESPI Technique
p.53

Calculation of Local Stress-Strain Behavior at Notches for Non-Masing Material under Cyclic Loading
p.59

A Study on the Relationship between Fatigue Crack Opening Behavior and Reversed Plastic Zone Size
p.66

Shot Peening and Fatigue Crack Growth in 7075-T7351 Aluminum
p.72

Dynamic Behavior of Underground Structures in Multi-Layered Media
p.78

HomeKey Engineering MaterialsKey Engineering Materials Vols. 297-300Measurement of Continuous Micro-Tensile Strain...

Measurement of Continuous Micro-Tensile Strain Using Micro-ESPI Technique

Abstract:

To determine the micro-mechanical properties for micro/nano materials, it may be essential to measure the strain/deformation during micro-mechanical testing. Therefore, in this study, continuous measurement of in-plane tensile strain in micro-sized specimens of thin film materials was introduced using the micro-ESPI technique. TiN and Au thin films 1 and 0.47µm thick, respectively, were deposited on the silicon wafer and fabricated into the micro-sized tensile specimens by the electromachining process. The micro-tensile loading system and micro-ESPI system were developed to measure the tensile strain during micro-tensile loading. Micro-tensile stress-strain curves for these materials were determined using the algorithm for continuous strain measurement. Furthermore, the new algorithm for enhancing the sensitivity to measurement of in-plane tensile strain was suggested. Using the algorithm, micro-tensile strain data between interfringes were calculated. It is shown that the algorithm for enhancement of the sensitivity suggested in this study makes the sensitivity to the in-plane tensile strain increase.