A Study on Design of Ultra-Precision Micro-Feed Stage
Ultra-precision positioning technique has become one of the important parts in the development of precision machines. Flexure stage driven by piezoelectric actuator (PZT) has been used widely as micro-feed installation because they have many advantages, such as: driving directly, fine displacement resolution, no friction or spacing. This paper designed a micro-feed stage driven by PZT using clinograph mechanism, analyzed the influence of flexure hinges on the static and dynamic performance of micro-feed stage based on finite element analysis. The design procedure was presented by which we can determine the geometrical dimensions of flexure hinge easily and achieve desired performance parameters of the stage, and the effectiveness of the design method was validated by experiment.
Zhejun Yuan, Xipeng Xu, Dunwen Zuo, Julong Yuan and Yingxue Yao
Q. Zhang and Z. S. Lu, "A Study on Design of Ultra-Precision Micro-Feed Stage", Key Engineering Materials, Vols. 315-316, pp. 131-135, 2006