Preparation of C-Ru-RuO2 Nano-Composite Films by Plasma-Enhanced CVD and their Electrode Property

Masato Sakata; Teiichi  Kimura; Takashi Goto

doi:10.4028/www.scientific.net/KEM.350.155

Paper Titles

Electrochemical Properties of Lithium Titanate Synthesized by Reassembly of Nanosheets
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CO₂ Absorption Properties of Barium Orthotitanate under Continuous Operation
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Investigation of the Oxide Ion Conduction Mechanism in LaGaO₃-Based Electrolytes through High-Temperature Neutron Powder Diffraction
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Preparation of TiO₂ Thin Films by Electrophoresis Deposition Method for Dye-Sensitized Solar Cells
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Preparation of C-Ru-RuO₂ Nano-Composite Films by Plasma-Enhanced CVD and their Electrode Property
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Behavior of γ-MnO₂ Containing TiB₂ as a Cathode in Aqueous Lithium Hydroxide Electrolyte Battery
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Superconductivity of Layered Perovskite Synthesized by Soft Chemistry
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Oxygen Reduction Electrode Properties of Pyrochlores Ln₂Ru₂O_7-δ(Ln=Pr, Nd, Sm) in Aqueous Solutions
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Effects of the Substitution of Β-Site Ion on Oxygen Reduction Electrode Properties of Pb₂Ru₂O_{7- δ} in Aqueous Solutions
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Preparation of C-Ru-RuO₂ Nano-Composite Films by Plasma-Enhanced CVD and their Electrode Property

Abstract:

C-Ru-RuO2 nano-composite films were prepared by plasma-enhanced chemical vapor deposition and their microstructure and electrode properties were investigated. Ru-C nano-composite films consisted of Ru nano-particles of 3 nm in diameter and an amorphous C matrix. With increasing oxygen gas flow rate (FRO2), the volume fraction of C decreased from 0.91 to 0 and Ru nano-particle size increased from 2.5 to 4.5 nm. At high FRO2, the film consisted on the fibrous RuO2 and Ru-C nano-composite layer. Ru-C nano-composite containing 91 vol% C showed the highest interfacial electrical conductivity below 673 K, and Ru-C/RuO2 composite containing 0 – 5 vol% C showed the highest interfacial electrical conductivity at 873 K. Electro-motive-force (EMF) values of an oxygen concentration cell constructed from a YSZ electrolyte and Ru-C or Ru-C/RuO2 composite electrodes responded to the change of oxygen gas partial pressure at more than 473 K. The response time of the concentration cell with Ru-C nano-composite electrodes at 573 K was less than 10 s, and that with Ru-C/RuO2 composite electrodes was about 300 s.