Optimal Design of Microaccelerometer

Abstract:

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This paper presents a nonlinear optimization design of microaccelerometer. The sensitivity rates with respect to the structural sizes, for example, length, width, and depth, are simulated before we start the optimal design. Four types of microaccelerometers are investigated that the maxima sensitivity and bandwidth are taken into the design specification. The results meet the requirement of large bandwidth successfully.

Info:

Periodical:

Key Engineering Materials (Volumes 381-382)

Edited by:

Wei Gao, Yasuhiro Takaya, Yongsheng Gao and Michael Krystek

Pages:

431-434

DOI:

10.4028/www.scientific.net/KEM.381-382.431

Citation:

Y. C. Liang and Y. P. Sun, "Optimal Design of Microaccelerometer", Key Engineering Materials, Vols. 381-382, pp. 431-434, 2008

Online since:

June 2008

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Price:

$35.00

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