Optimal Design of Microaccelerometer

Yen Chu Liang; Yun Ping Sun

doi:10.4028/www.scientific.net/KEM.381-382.431

Paper Titles

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Validated Uncertainty Evaluation for Self-Validating Sensor
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Ultrareliable Measuring Complex for Nuclear Reactor of New Generation
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Key Technique of Tip Clearance Measurement for Rotational Blades
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Optimal Design of Microaccelerometer
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Measurement of Strain Induced by Impact with Fiber Bragg Grating
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Sensor Dynamic Modeling Based on LS-SVM and NGA
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Application of Particle Swarm Optimization-Based Digital Beamforming Technique to the Identification of Multiple SAW Tags
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Study on Oil and Gas Pipeline Leakage Real-Time Inspection System Based on Distributed Optical Fiber
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HomeKey Engineering MaterialsKey Engineering Materials Vols. 381-382Optimal Design of Microaccelerometer

Optimal Design of Microaccelerometer

Abstract:

This paper presents a nonlinear optimization design of microaccelerometer. The sensitivity rates with respect to the structural sizes, for example, length, width, and depth, are simulated before we start the optimal design. Four types of microaccelerometers are investigated that the maxima sensitivity and bandwidth are taken into the design specification. The results meet the requirement of large bandwidth successfully.