Optimal Design of Microaccelerometer
This paper presents a nonlinear optimization design of microaccelerometer. The sensitivity rates with respect to the structural sizes, for example, length, width, and depth, are simulated before we start the optimal design. Four types of microaccelerometers are investigated that the maxima sensitivity and bandwidth are taken into the design specification. The results meet the requirement of large bandwidth successfully.
Wei Gao, Yasuhiro Takaya, Yongsheng Gao and Michael Krystek
Y. C. Liang and Y. P. Sun, "Optimal Design of Microaccelerometer", Key Engineering Materials, Vols. 381-382, pp. 431-434, 2008