The Research on Micro-Drive Device of Reflective Lens Frame with High Precision and Big Caliber
A micro-drive device was developed to drive reflective lens frame in Inertial Confinement Fusion. The transmission consists of ball screw, flexible hinge and electrical control unit. Two different flexible hinges named straight round and cylinder interlaced flexible hinge were used in device. The communication between IPC and PLC is founded by MSComm, which realizes the distributing system. Tested on TM5 reflective lens frame of SG- III prototype facility, the precision achieved ±0.3μm/step, which meets the design target.
Guanglin Wang, Huifeng Wang and Jun Liu
M. Lian and H. Y. Fu, "The Research on Micro-Drive Device of Reflective Lens Frame with High Precision and Big Caliber", Key Engineering Materials, Vols. 392-394, pp. 836-840, 2009