Development of Novel XY Micropositioning Stage

Hua Wei Chen; De Huai Jiang; Ichiro Hagiwara

doi:10.4028/www.scientific.net/KEM.407-408.103

Paper Titles

Research on the Method of Improving Accuracy of Parallel Machine Tools
p.85

Study on the Accuracy of 3-RPS Parallel Machine Tools
p.89

A Novel Determination Algorithm of Locating Parameters for Fixture Design
p.94

The Technical Study on Cylinder Cam Machining
p.99

Development of Novel XY Micropositioning Stage
p.103

Optimization of Distribution Model for CNC Lathes Early Failures
p.107

Grey System Theory Modeling for Nonlinear, Dynamic Machine Tool Thermal Error
p.112

Research on Intelligent Controller for EDM Online Parameters
p.117

Laser-Assisted Truing for Metal-Bonded Diamond Wheel
p.122

HomeKey Engineering MaterialsKey Engineering Materials Vols. 407-408Development of Novel XY Micropositioning Stage

Development of Novel XY Micropositioning Stage

Abstract:

Along with the rapid development of semiconductor, photonics and ultra-precision engineering, ultra-precision positioning stages are becoming more necessary than ever. In this study, one novel XY micropositioning stage is proposed, in which bi-axis circular notch flexure and cantilever hinge mechanism are optimal designed as bearing to provide smooth and guided motion. The theoretical stiffness of stage is provided and verified by FEM analysis. Finally, the micro-positioning stage is built and its resolution is experimentally validated to be less than 4nm.

You might also be interested in these eBooks

View Preview

Info:

Periodical:

Key Engineering Materials (Volumes 407-408)

Pages:

103-106

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.407-408.103

Citation:

Cite this paper

Online since:

February 2009

Authors:

Hua Wei Chen, De Huai Jiang, Ichiro Hagiwara

Keywords:

2-DOF, Flexure Hinge, Micropositioning Stage, PZT

Export:

RIS, BibTeX

Price:

Permissions CCC:

Request Permissions

Permissions PLS:

Request Permissions

Сopyright:

Citation:

References

[1] M. Goken, Scanning tunneling microscopy in UHV with an XYZ micropositioner, " Rev. Sci. Instrum., vol. 65, no. 7, pp.2252-2254, Jul. (1994).

Google Scholar

[2] B. Zhang and Z. Zhu, Developing a linear piezomotor with nanometer resolution and high sti_ness, IEEE/ASME Trans. Mechatron., vol. 2, no. 1, pp.22-29, (1997).

DOI: 10.1109/3516.558855

Google Scholar

[3] F. E. Scire and E. C. Teague, Piezodriven 50-um range stage with subnanometer resolution, " Rev. Sci. Instrum., vol. 49, no. 12, pp.1735-1740, Dec. (1978).

DOI: 10.1063/1.1135327

Google Scholar

[4] S. H. Chang and B. C. Du, A precision piezodriven micropositioner mechanism with large travel range, " Rev. Sci. Instrum., vol. 69, no. 4, pp.1785-1791, Apr. (1998).

DOI: 10.1063/1.1148842

Google Scholar

[5] J. W. Ryu and D. G. Gweon, High precision XY_ micropositioning stage using monolithic flexural pivoted linkages, Proc. 11th Annu. Mtg., Amer. Soc. Precision Eng., Monterey, CA, vol. 14, pp.626-650, Nov. 9, 14, (1996).

Google Scholar

1. 0 2. 0 3. 0 4. 0 5. 0.

Google Scholar

[1] Time s 2nm Displacement nm Fig. 6 Environment noise on the stage -1.

Google Scholar

1. 0 2. 0 3. 0 4. 0 -4.

Google Scholar

[4] [8] [12] [16] [20] [24] [28] [32] Time s 4nm Fig. 7 Resolution of the stage Displacement nm.

Google Scholar