Micro Coordinate Measuring Machine for Parallel Measurement of Microstructures

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Abstract:

This paper deals with the development of a coordinate measuring machine for parallel tactile probing of microstructures. The particular challenges due to the parallel probing will be discussed and the concluding results regarding the construction, the control and the simulation environment will be outlined.

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136-140

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Online since:

May 2010

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© 2010 Trans Tech Publications Ltd. All Rights Reserved

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