Micro Coordinate Measuring Machine for Parallel Measurement of Microstructures
This paper deals with the development of a coordinate measuring machine for parallel tactile probing of microstructures. The particular challenges due to the parallel probing will be discussed and the concluding results regarding the construction, the control and the simulation environment will be outlined.
Yuri Chugui, Yongsheng Gao, Kuang-Chao Fan, Roald Taymanov and Ksenia Sapozhnikova
C. Schrader et al., "Micro Coordinate Measuring Machine for Parallel Measurement of Microstructures", Key Engineering Materials, Vol. 437, pp. 136-140, 2010