The Current Status of Ion Implantation Process in Industrial Applications

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Periodical:

Key Engineering Materials (Volumes 46-47)

Edited by:

A. P. Loureiro, O. Conde, L. Guerra-Rosa and R. Vilar

Pages:

525-534

Citation:

P. Sioshansi, "The Current Status of Ion Implantation Process in Industrial Applications", Key Engineering Materials, Vols. 46-47, pp. 525-534, 1990

Online since:

January 1991

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