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HomeKey Engineering MaterialsKey Engineering Materials Vols. 46-47The Current Status of Ion Implantation Process in...

The Current Status of Ion Implantation Process in Industrial Applications

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Surface Engineering with High Energy Beams

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Periodical:

Key Engineering Materials (Volumes 46-47)

Pages:

525-534

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.46-47.525

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Online since:

January 1990

Authors:

P. Sioshansi

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© 1990 Trans Tech Publications Ltd. All Rights Reserved

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