Absolute Calibration of the Rotary Encoder Considering the Influence on-Machine for Development of High-Speed Nanoprofiler
The development of a high-speed nanoprofiler is essential for developing the next generation of ultraprecision aspheric mirrors. The purpose of this study is to develop a new high-speed nanoprofiler that traces the normal vector of an aspheric mirror surface. The method of measurement adopted here is based upon the accuracy of a rotation goniometer. In order to attain a form measurement accuracy of PV1nm, it is necessary to improve the angle measurement accuracy. In this study, we equip a nanoprofiler with a rotary encoder that is calibrated in order to accomplish this objective, using a national standard machine. Consequently, this rotary encoder can be calibrated with an accuracy of ±0.12 μrad when considering the influence of installing the encoder on the nanoprofiler.
Tojiro Aoyama, Hideki Aoyama, Atsushi Matsubara, Hayato Yoshioka and Libo Zhou
T. Kojima et al., "Absolute Calibration of the Rotary Encoder Considering the Influence on-Machine for Development of High-Speed Nanoprofiler", Key Engineering Materials, Vols. 523-524, pp. 842-846, 2012