Absolute Calibration of the Rotary Encoder Considering the Influence on-Machine for Development of High-Speed Nanoprofiler

Abstract:

The development of a high-speed nanoprofiler is essential for developing the next generation of ultraprecision aspheric mirrors. The purpose of this study is to develop a new high-speed nanoprofiler that traces the normal vector of an aspheric mirror surface. The method of measurement adopted here is based upon the accuracy of a rotation goniometer. In order to attain a form measurement accuracy of PV1nm, it is necessary to improve the angle measurement accuracy. In this study, we equip a nanoprofiler with a rotary encoder that is calibrated in order to accomplish this objective, using a national standard machine. Consequently, this rotary encoder can be calibrated with an accuracy of ±0.12 μrad when considering the influence of installing the encoder on the nanoprofiler.

• Periodical: Key Engineering Materials (Volumes 523-524)
• Pages: 842-846
• DOI: https://doi.org/10.4028/www.scientific.net/KEM.523-524.842
• Online since: November 2012
• Authors: Takuya Kojima, Koji Usuki, Takao Kitayama, Daisuke Tonaru, Hiroki Matsumura, Junichi Uchikoshi, Yasuo Higashi, Katsuyosi Endo
• Keywords: Absorute Profiler, Aspheric Mirror, Direct Measurement, Normal Vector, Rotary Encoder, Simultaneous Five-Axis Control, Slope Error, Ultra-Precision Machining, Ultraprecision Mirror

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