Absolute Calibration of the Rotary Encoder Considering the Influence on-Machine for Development of High-Speed Nanoprofiler

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The development of a high-speed nanoprofiler is essential for developing the next generation of ultraprecision aspheric mirrors. The purpose of this study is to develop a new high-speed nanoprofiler that traces the normal vector of an aspheric mirror surface. The method of measurement adopted here is based upon the accuracy of a rotation goniometer. In order to attain a form measurement accuracy of PV1nm, it is necessary to improve the angle measurement accuracy. In this study, we equip a nanoprofiler with a rotary encoder that is calibrated in order to accomplish this objective, using a national standard machine. Consequently, this rotary encoder can be calibrated with an accuracy of ±0.12 μrad when considering the influence of installing the encoder on the nanoprofiler.

Info:

Periodical:

Key Engineering Materials (Volumes 523-524)

Edited by:

Tojiro Aoyama, Hideki Aoyama, Atsushi Matsubara, Hayato Yoshioka and Libo Zhou

Pages:

842-846

Citation:

T. Kojima et al., "Absolute Calibration of the Rotary Encoder Considering the Influence on-Machine for Development of High-Speed Nanoprofiler", Key Engineering Materials, Vols. 523-524, pp. 842-846, 2012

Online since:

November 2012

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$38.00

[1] Shinan Qian,  Werner  Jark, Peter Z. Takacs, The penta‐prism LTP: A long‐trace‐profiler with stationary optical head and moving penta prism, Review of Scientific Instruments, vol. 66, No. 3 (1995)pp.2562-2569.

DOI: https://doi.org/10.1063/1.1145658

[2] Giovanni Sostero, Peter Z. Takacs, Shinan Qian, Precision calibration and systematic error reduction in the long trace profiler, Opt. Eng. Vol. 39 (2000)p.304.

DOI: https://doi.org/10.1117/1.602364

[3] Y. HIGASHI, Y. TAKAIE, K. ENDO, T. KUME, K. ENAMI, K. YAMAUCHI, K. YAMAMURA, H. SANO, K. UENO and Y. MORI, A New Designed Ultra-high Precision Profiler: SPIE Optics + Photonics , August (2006) San Diego, CA, USA.

DOI: https://doi.org/10.1117/12.617986

[4] Y. HIGASHI, Y. TAKAIE, K. ENDO, T. KUME, K. ENAMI, K. YAMAUCHI, K. YAMAMURA, H. SANO, K. UENO and Y. MORI, Surface Gradient Integrated Profiler for X-ray and EUV optics - 3D mapping of 1m-long flat mirror and off-axis parabolic mirror -, SPIE Optics + Photonics August (2005).

DOI: https://doi.org/10.1117/12.680245

[5] Yasuo Higashi, Yuichi Takaie, Katsuyoshi Endo, Tatsuya Kume, Kazuhiro Enami, Kazuto Yamauchi, Surface gragient integrated profiler for X-ray and EUV optics, SCIENCE AND TECHNOLOGY OF ADVANCED MATERIALS, Vol. 8, No. 3, (2007) pp.177-180.

DOI: https://doi.org/10.1016/j.stam.2007.02.011