New Non-Contact Measurement of Small inside-Diameter Using Tandem Low-Coherence Interferometer and Optical Fiber Devices

Kenta Matsui; Hirokazu Matsumoto; Satoru Takahashi; Kiyoshi Takamasu

doi:10.4028/www.scientific.net/KEM.523-524.871

Paper Titles

Analysis and Measurement of the Dynamic Motions of a Large-Scale Rotating Roll Workpiece
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Eccentric Error Compensation for Pitch Deviation Measurement of Gears
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Form Error Characterization of Reflective-Type Gratings
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Development of an Optical Heterogeneity Evaluation System Using Phase-Shift Digital Holography
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New Non-Contact Measurement of Small inside-Diameter Using Tandem Low-Coherence Interferometer and Optical Fiber Devices
p.871

Development of a Non-Contact Precision Measurement Technique Using Optical Frequency Combs
p.877

Sphericity Measurement Using Stitching Interferometry
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Proposal of Improving Method of Rotational 2-Axis Synchronous Accuracy of Plate Motion Control with a Dual Arm Robot by Estimating Ball Rolling Motion on the Plate
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Pivot Turning Measurement of Relative Position and Posture for Moving Robots System Using Stereo-Camera
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HomeKey Engineering MaterialsKey Engineering Materials Vols. 523-524New Non-Contact Measurement of Small...

New Non-Contact Measurement of Small inside-Diameter Using Tandem Low-Coherence Interferometer and Optical Fiber Devices

Abstract:

Recently, manufacturing techniques of small-scale products have been improved. As a result, precise measurement is required of small inside diameters, for example, of engine nozzles. However, an in situ measurement and measurement system for small-sized products has yet to be fully established. In this research, a contactless technique to measure small inside diameters is proposed. This new method uses tandem low-coherence interferometry and an optical fiber cut at an angle of 45°. This optical fiber is up to 30 μm in diameter and is used as a probe. Our objective is to measure holes as small as 50-μm inside diameter with an accuracy of 100 nm. In the present paper, we report on the measurement principle, calculate the measurement uncertainty and show that experimental measurements can be obtained of small-size holes up to 300-μm inside diameter with an accuracy of 100 nm.

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Periodical:

Key Engineering Materials (Volumes 523-524)

Pages:

871-876

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.523-524.871

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Online since:

November 2012

Authors:

Kenta Matsui, Hirokazu Matsumoto, Satoru Takahashi, Kiyoshi Takamasu

Keywords:

45°-Cut Optical Fiber, Low Coherence Interferometer, Non-Contact Measurement, Small-Size Diameter Measurement

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References

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