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Characterization of Cr Doped Diamond-Like Carbon Films and Research on Mechanical Properties

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Abstract:

Diamond-like carbon (DLC) films have been extensively studied for more than a decade due to their unique combination of properties. The internal compressive stress affects their adhesion and preventing wide usage of these films. Metal-containing DLC films are expected to relax internal stress. The present work focused on the synthesis, chemical bond and mechanical property characterization of Cr-containing DLC films. The films thickness, internal stress and composition were characterized by scanning electron microscopy, optical interferometry and X-ray photoelectron spectroscopy respectively. Incorporation of Cr into DLC causes an initial internal stress reduction and subsequent stabilization around 0.5 GPa. The hardness behavior was found to depend on Cr content. Films with less than 7.36 at.% Cr (no formation of C-Cr bond) showed a dramatically hardness reduction compared to pure DLC films. Above 7.36 at.% Cr (C-Cr bond formed) the hardness increases above 12 GPa.

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Periodical:

Key Engineering Materials (Volumes 531-532)

Pages:

523-526

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.531-532.523

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Online since:

December 2012

Authors:

You Yu Fan, Guang Li, Yuan Xia

Keywords:

Cr-DLC Films, Internal Stress, Nanohardness, XPS

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© 2013 Trans Tech Publications Ltd. All Rights Reserved

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