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A Novel Analytical Method for Designing Microelectromechanical Filters

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Abstract:

This work presents a novel analytical model for designing resonator-based MEMS filters, which eliminate the computing error caused by material parameters and generates more reliable theoretical model. This model is comfired by a composite-array filter in the work. Furthermore, this model can be applied for MEMS filters formed by any type of resonators, the geometries of the mechanical coupling beams are determined with high precision.

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Periodical:

Key Engineering Materials (Volumes 562-565)

Pages:

1281-1284

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.562-565.1281

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Cite this paper

Online since:

July 2013

Authors:

Hui Zhao, Wei Luo, Jin Ling Yang, Fu Hua Yang

Keywords:

Coupling Beam, Disk Resonator, MEMS Filter, Quarter-Wavelength

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© 2013 Trans Tech Publications Ltd. All Rights Reserved

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References

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