Evolution of TiN Coating Surface Roughness during Physical Vapor Deposition on High Speed Steel Substrate

Leonid Kupchenko; Rauno Tali; Eron Adoberg; Valdek Mikli; Vitali Podgursky

doi:10.4028/www.scientific.net/KEM.604.67

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Erosion Wear of Reactive Sintered WC-TiC-Co Cermets
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Evolution of TiN Coating Surface Roughness during Physical Vapor Deposition on High Speed Steel Substrate
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HomeKey Engineering MaterialsKey Engineering Materials Vol. 604Evolution of TiN Coating Surface Roughness during...

Evolution of TiN Coating Surface Roughness during Physical Vapor Deposition on High Speed Steel Substrate

Abstract:

TiN coatings with different thickness were prepared by arc ion plating (AIP) physical vapor deposition (PVD) on high speed steel (HSS) substrates. TiN coatings surface roughness was investigated by atomic force microscopy (AFM) and 3D optical profilometry and growth kinetics was described using scaling exponents β and α. The growth exponent β is 0.91-1.0 and the roughness exponent α is 0.77-0.81. Due to relatively high value of the exponent α, the surface diffusion is likely predominant smoothening mechanism of TiN growth.

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Periodical:

Key Engineering Materials (Volume 604)

Pages:

67-70

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.604.67

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Online since:

March 2014

Authors:

Leonid Kupchenko, Rauno Tali, Eron Adoberg, Valdek Mikli, Vitali Podgursky*

Keywords:

Scaling Exponents, Surface Roughness (SR), TiN Coating

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* - Corresponding Author

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