Formation of ZrO2 and YSZ Layers by Microwave Plasma Assisted MOCVD Process

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Periodical:

Key Engineering Materials (Volumes 61-62)

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Edited by:

A.J. Burggraaf, J. Charpin and L. Cot

Pages:

11-16

DOI:

10.4028/www.scientific.net/KEM.61-62.11

Citation:

G. Meng et al., "Formation of ZrO2 and YSZ Layers by Microwave Plasma Assisted MOCVD Process", Key Engineering Materials, Vols. 61-62, pp. 11-16, 1992

Online since:

January 1992

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$35.00

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