Simulation Study of Material Deformation in Monocrystal Silicon Nano-Machining

Abstract:

Molecular dynamics simulations method is used on the study of material deformation in monocrystal silicon during nanomachining. Both nanoindentation and nanocutting by a diamond tool tip is investigated using LAMMPS. Characterization methods such as coordination number and labeling atoms in different layers have been adopted to study the law of transformation. As the surface atoms are tracked, their transformation law is analyzed and the formation mechanism of the cuttings and finished surface is announced. The impact crystal orientation of silicon on the machining is also studied.

• Periodical: Key Engineering Materials (Volume 621)
• Pages: 32-37
• DOI: https://doi.org/10.4028/www.scientific.net/KEM.621.32
• Online since: August 2014
• Authors: Nan Yu, Ying Chun Liang, Jia Xuan Chen, Yong Bo Guo
• Keywords: Molecular Dynamics Simulations, Monocrystal Silicon, Nanocutting, Nanoindentation

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