Surface Micromachined Mirror Based on Pre-Stress Comb-Drive Actuator

Abstract:

A micromirror fabricated by surface micromachined process is developed. The developed micromirror contains four pre-stress comb-drive actuators, which support tip/tilt/piston degrees of freedom. Pre-stress comb-drive actuators have the advantage of large displacement and fast response. Prototype is fabricated by a commercially available MEMS surface micromachined process. Experimental results indicate that the device can realize designed function and have the potential in MOEMS applications.

• Periodical: Key Engineering Materials (Volumes 645-646)
• Pages: 1115-1119
• DOI: https://doi.org/10.4028/www.scientific.net/KEM.645-646.1115
• Online since: May 2015
• Authors: Wei Min Wang, Sheng Mei Yan, Qiang Wang, Chuan Kai Qiu, Ze Xiang Chen, Bin Fan*
• Keywords: Electrostatically Actuated, Micromirror, Pre-Stress Comb-Drive Actuator (PCA), Surface Micromachined

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