Polymer-Based Capacity Micromachined Ultrasonic Transducer for Surface Roughness Measurement

Abstract:

A polymer-based capacitive micromachined ultrasonic transducer (CMUT) is developed to measure surface roughness. The transducer is designed with two groups in a ratio of two to one. By using air-coupled ultrasound, the transducer can evaluate surface roughness in five modes: full transmission/ full reception, majority transmission/ majority reception, majority transmission/ minority reception, minority transmission/ majority reception, and minority transmission/ minority reception. Experimentation shows the CMUT can identify the surface roughness using a sample of sandpaper with surface roughness Rrms ranging from 11.4μm to 179.8μm. The results indicate that the full transmission/ full reception mode has maximum signal output and the minority transmission/ majority reception mode can obtain a good signal output with a better energy efficiency rating.

• Periodical: Key Engineering Materials (Volume 661)
• Pages: 22-28
• DOI: https://doi.org/10.4028/www.scientific.net/KEM.661.22
• Online since: September 2015
• Authors: Gia Thinh Bui, Yi Ze Chen, Da-Chen Pang*
• Keywords: Air-Coupled, Capacitive Micromachined Ultrasonic Transducer (CMUT), Polymer-Based, Roughness

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