Orthogonal Experiment Study of Micro/Nano Motion Platform

Rong Li Zhao; Xin Chen; Ke Tian Li

doi:10.4028/www.scientific.net/KEM.679.107

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HomeKey Engineering MaterialsKey Engineering Materials Vol. 679Orthogonal Experiment Study of Micro/Nano Motion...

Orthogonal Experiment Study of Micro/Nano Motion Platform

Abstract:

This paper introduced a kind of micro/nanomotion platform. The platform mainly includes 12 flexible hinges, piezoelectric ceramic driver (PZT), motion platform (loaded platform), pre-tightening force adjusting screw and so on. The orthogonal experiment method was used to the output displacement of the micro/nanoplatform. The relationship among the voltage, pre-tightening force and output displacement of the platform was analyzed. The factor level table of the output displacement was produced. The experimental system was established by Laser interferometer and pressure sensor, then the output displacement was obtained when the voltage ranges from 0V to 150V on the condition of every force (20N, 40N, 60N, 80N and 100N). The experimental result lays the foundation for the regression analysis of the output displacement of the platform.

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Periodical:

Key Engineering Materials (Volume 679)

Pages:

107-110

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.679.107

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Online since:

February 2016

Authors:

Rong Li Zhao, Xin Chen, Ke Tian Li*

Keywords:

Micro/Nanomotion Platform, Orthogonal Experiment, Output Displacement, Piezoelectric Ceramic Driver

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* - Corresponding Author

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